@article{zhang2017double, title={A double-lithography and double-reflow process and application to multi-pitch multi-height mechanical flexible interconnects}, author={Zhang, Chaoqi and Yang, Hyung Suk and Bakir, Muhannad S}, journal={Journal of Micromechanics and Microengineering}, volume={27}, number={2}, pages={025014}, year={2017}, publisher={IOP Publishing} }