@inproceedings{dembla2012high, title={High aspect ratio TSVs in micropin-fin heat sinks for 3D ICs}, author={Dembla, Ashish and Zhang, Yue and Bakir, Muhannad S}, booktitle={2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO)}, pages={1--6}, year={2012}, organization={IEEE} }