@inproceedings{thacker2005probe, title={Probe module for wafer-level testing of gigascale chips with electrical and optical I/O interconnects}, author={Thacker, Hiren and Ogunsola, Oluwafemi and Bakir, Muhannad and Meindl, James}, booktitle={ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems collocated with the ASME 2005 Heat Transfer Summer Conference}, pages={1593--1599}, year={2005}, organization={American Society of Mechanical Engineers Digital Collection} }