@inproceedings{wan2016grating, title={Grating Design for 3-D Interconnections of Waveguides in Overlaid Chips Using the RCWA-EIS Method}, author={Wan, Congshan and Gaylord, Thomas K and Bakir, Muhannad S}, booktitle={Laser Science}, pages={JW4A--127}, year={2016}, organization={Optical Society of America} }