@inproceedings{bakir2007flexible, title={Flexible polymer pillars for optical chip assembly: materials, structures, and characterization}, author={Bakir, Muhannad S and Kohl, Paul A and Glebov, Alexei L and Elce, Ed and Bhusari, Dhananjay and Lee, Michael G and Meindl, James D}, booktitle={Photonics Packaging, Integration, and Interconnects VII}, volume={6478}, pages={647802}, year={2007}, organization={International Society for Optics and Photonics} }