@inproceedings{zhang20153d, title={3D IC with embedded microfluidic cooling: technology, thermal performance, and electrical implications}, author={Zhang, Xuchen and Han, Xuefei and Sarvey, Thomas E and Green, Craig E and Kottke, Peter A and Fedorov, Andrei G and Joshi, Yogendra and Bakir, Muhannad S}, booktitle={ASME 2015 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems collocated with the ASME 2015 13th International Conference on Nanochannels, Microchannels, and Minichannels}, year={2015}, organization={American Society of Mechanical Engineers Digital Collection} }