@article{gu2014endpoint,
  title={Endpoint detection in low open area TSV fabrication using optical emission spectroscopy},
  author={Gu, Ja Myung and Thadesar, Paragkumar A and Dembla, Ashish and Bakir, Muhannad S and May, Gary S and Hong, Sang Jeen},
  journal={IEEE Transactions on Components, Packaging and Manufacturing Technology},
  volume={4},
  number={7},
  pages={1251--1260},
  year={2014},
  publisher={IEEE}
}