@article{yang2014self,
  title={Self-aligned silicon interposer tiles and silicon bridges using positive self-alignment structures and rematable mechanically flexible interconnects},
  author={Yang, Hyung Suk and Zhang, Chaoqi and Bakir, Muhannad S},
  journal={IEEE Transactions on Components, Packaging and Manufacturing Technology},
  volume={4},
  number={11},
  pages={1760--1768},
  year={2014},
  publisher={IEEE}
}