@inproceedings{dang2005wafer,
  title={Wafer-level microfluidic cooling interconnects for GSI},
  author={Dang, Bing and Joseph, Paul and Bakir, Muhannad and Spencer, Todd and Kohl, Paul and Meindl, James},
  booktitle={Proceedings of the IEEE 2005 International Interconnect Technology Conference, 2005.},
  pages={180--182},
  year={2005},
  organization={IEEE}
}