@inproceedings{thacker2006optical, title={Optical through-wafer interconnects for 3D hyper-integration}, author={Thacker, Hiren and Ogunsola, Oluwafemi and Carson, Ashley and Bakir, Muhannad and Meindl, James}, booktitle={LEOS 2006-19th Annual Meeting of the IEEE Lasers and Electro-Optics Society}, pages={28--29}, year={2006}, organization={IEEE} }