@inproceedings{thadesar2013novel, title={Novel photodefined polymer-clad through-silicon via technology integrated with endpoint detection using optical emission spectroscopy}, author={Thadesar, Paragkumar A and Gu, JaMyung and Dembla, Ashish and Hong, Sang Jeen and May, Gary S and Bakir, Muhannad S}, booktitle={ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference}, pages={56--61}, year={2013}, organization={IEEE} }