@inproceedings{thadesar2014low,
  title={Low-loss silicon interposer for three-dimensional system integration with embedded microfluidic cooling},
  author={Thadesar, Paragkumar A and Zheng, Li and Bakir, Muhannad S},
  booktitle={2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers},
  pages={1--2},
  year={2014},
  organization={IEEE}
}