@inproceedings{wahby2013evaluation,
  title={Evaluation of 3DICs and fabrication of monolithic interlayer vias},
  author={Wahby, William and Dembla, Ashish and Bakir, Muhannad},
  booktitle={2013 IEEE International 3D Systems Integration Conference (3DIC)},
  pages={1--6},
  year={2013},
  organization={IEEE}
}