@inproceedings{yang2013self,
  title={Self-alignment structures for heterogeneous 3D integration},
  author={Yang, Hyung Suk and Zhang, Chaoqi and Bakir, Muhannad S},
  booktitle={2013 IEEE 63rd Electronic Components and Technology Conference},
  pages={232--239},
  year={2013},
  organization={IEEE}
}